第36卷第1期2023年1月传感技术学报CHINESEJOURNALOFSENSORSANDACTUATORSVol.36No.1Jan.2023项目来源:国家自然科学基金项目(61871125)收稿日期:2022-02-27修改日期:2022-05-10HighVoltageDrivenThree⁃AntinodeMulti⁃ringDiscResonantGyroscope∗XIADunzhu∗,YAOMohan,DUSen(SchoolofInstrumentScienceandEngineering,SoutheastUniversity,NanjingJiangsu210096,China)Abstract:Amulti⁃ringdiskresonantgyroscope(DRG)withahigh⁃voltagedrivingcircuitisdesignedandstudied.ThegyroscopehasaMEMSnestedringstructureandworksinthreeantinodes(n=3)vibrationmodes,withsmallerfrequencysplittingbetweenthedrivemodeandthesensemode.Thesystemisdrivenbythedoubleclosed⁃loopmeasurementandcontrolcircuit,withsimplestructure,goodstabilityandlargebandwidth.Thehigh⁃voltagedirectcurrentforthestiffnesstuningandthequadratureerrorcorrectionisprovidedbyaminiaturizedboostchopper.Thetestresultshowsthattheclosed⁃loopboostchopperhashighprecisionandlittleinfluenceonthebiasinstabilityofthegyroscope.Thegyroscopehasahighqualityfactor(Q=36503),alownonlinearity(314×10-6),alowanglerandomwalk(0.1664...