中国集成电路产业发展ChinalntegratedCircuitCIChttps://www.cicmag.com(总第290期)2023·7·溅射靶材在集成电路领域的应用及市场情况侯洁娜,陈颖,赵聪鹏,刘超,黄润坤中国电子信息产业发展研究院摘要:溅射沉积是一种物理气相沉积技术,用于薄膜制备,被广泛应用于集成电路、平板显示、光伏等电子信息产业。尤其是,溅射靶材作为用于溅射沉积的关键材料,在集成电路等领域发挥了重要作用。本文基于溅射靶材在不同领域的应用,介绍了靶材相关加工技术以及靶材性能的影响等内容,阐述了不同溅射靶材在集成电路制造工艺中的不同应用,并介绍了全球半导体靶材市场的整体情况以及全球主要靶材供应商的产品情况。关键词:溅射靶材;溅射沉积;集成电路ApplicationandMarketofSputteringTargetsinIntegratedCircuitFieldHOUJie-na,CHENYing,ZHAOCong-peng,LIUChao,HUANGRun-kunChinaCenterforInformationIndustryDevelopmentAbstract:Sputteringdeposition,asakindofphysicalvapordepositiontechnologyusedforfilmpreparation,iswidelyusedinintegratedcircuit,flatpaneldisplay,photovoltaicandotherelectronicinformationindustry.Sputteringtargetisthekeymaterialforsputteringdeposition,anditplaysanimportantroleinthefieldofintegratedcircuit.Basedontheapplicationofsputteringtargetindifferentfields,thispaperintroducestherelatedprocessingtechnology,theeffectofpropertiesandothercontentsofsputteringtarget.Thepaperalsodescribesthedifferentapplicationsofspecificsputteringtargetsinthemanufacturingprocessofintegratedcircuits,andintroducestheoverallsituationoftheglobalsemiconductortargetmarketandtheproductsofthemaintargetsuppliers.Keywords:sputteringtarget;sputteringdeposition;integratedcircuit23CIC中国集成电路ChinalntegratedCircuit产业发展(总第290期)2023·7·https://www.cicmag.com0引言溅射靶材应用于溅射沉积工艺,可用于集成电路产业的高性能薄膜制备,对集成电路产业发展具有重要推动作用。在应用中需要关注的是溅射靶材的材料、制备方法、性能参数等多个方面。随集成电路产业芯片产能的不断提升,集成电路用靶材市场规模也呈现增长趋势,但整体上看,集成电路用靶材市场仍呈现一定的技术垄断特征。1靶材在集成电路领域的应用1.1溅射沉积及靶材的定义与应用(1)溅射沉积及溅射靶材。溅射...