文章编号：1002-2082(2024)02-0446-07光栅干涉位移传感器信息解算方法研究祖凯旋，赵锐，石云波，张旭，陈玉楠，沈富明，刘豪（中北大学仪器科学与动态测试省部共建国家重点实验室，山西太原030051）摘要：面向光栅干涉式位移传感器信号高精度解算的需求，提出了一种基于椭圆拟合补偿及反正切算法的位移解算改进方法。采用傅里叶变换及标准化椭圆参数拟合法对信号误差估计，通过构建线性误差补偿模型对带误差信号进行正交补偿，结合反正切算法对信号进行线性化处理，实现高精度位移解算读出。Matlab仿真结果表明，该方法对信号正交补偿效果显著，线性化处理算法解算位移最大相对误差小于0.2%。为提高光栅干涉式传感器位移解算精度提供了有效途径和方法。关键词：光栅；位移；正交补偿；椭圆拟合；反正切；线性化处理中图分类号：TN29;TP391.9文献标志码：ADOI：10.5768/JAO202445.0208001ResearchoninformationsolutionmethodofgratinginterferencedisplacementsensorZUKaixuan，ZHAORui，SHIYunbo，ZHANGXu，CHENYunan，SHENFuming，LIUHao（StateKeyLaboratoryofInstrumentScienceandDynamicMeasurement,NorthUniversityofChina,Taiyuan030051,China）Abstract：Aimingattheincreasingdemandforsignalhigh-precisionsolutionmethodsofgratinginterfer-ometricdisplacementsensors,animprovedmethodofdisplacementsolutionbasedonellipsefittingcompen-sationandarctangentalgorithmwasproposed.TheestimationofsignalerrorparameterswasrealizedbyFouriertransformandnormalizedellipticparameterfittingmethod,theorthogonalcompensationofthesignalwitherrorswascarriedoutbyconstructingalinearerrorcompensationmodel,andthesignalwaslinearizedwiththearctangentalgorithmtofinallyachievehigh-precisiondisplacementsolutionreadout.ThesimulationresultsofMatlabshowthatthismethodishighlyeffectiveforthesignalorthogonalcompensationeffects,andthemaximumrelativeerrorofdisplacementsolutionforlinearizationislessthan0.2%,whichprovidesaneffectivewayandmethodtoimprovethedisplacementsolutionprecisionofgratinginterferometricsensors.Keywords：grating；displacement；orthogonalcompensation；ellipsefitting；arctangent；linearization引言随着科学技术的发展，精密仪器制造及微纳器件加工等领域对精密位移检测技术需求不...
