超高真空计微弱离子流检测技术研究姚鹏，李得天*，张虎忠，葛金国，马卓娅，成永军，阴怡媛（兰州空间技术物理研究所真空技术与物理重点实验室，兰州730000）摘要：在超高真空环境下，Bayard-Alpert型电离真空计通过电离气体分子得到的离子流信号十分微弱，且极易受到干扰。介绍了一种用于超高真空测量的微弱信号检测系统，包括测量电路、调零电路与处理模块。该系统采用高精度放大器与高绝缘继电器，可以实现微弱信号的精密放大，满足mA级至亚pA级范围的宽量程电流信号检测；能够自动完成测量档位的切换、系统调零、数据处理与真空全压力值计算，测量下限可达10-13A量级，可用于超高真空计离子流的精确测量，具有良好的线性及稳定性。关键词：宽量程；微弱信号；超高真空测量；电离真空计中图分类号：TB772文献标志码：A文章编号：1006-7086（2023）02-0111-06DOI：10.3969/j.issn.1006-7086.2023.02.002ResearchontheWeakIonCurrentDetectionTechnologyofUltra-highVacuumGaugeYAOPeng，LIDetian*，ZHANGHuzhong，GEJinguo，MAZhuoya，CHENGYongjun，YINYiyuan（ScienceandTechnologyonVacuumTechnologyandPhysicsLaboratory，LanzhouInstituteofPhysics，Lanzhou730000，China）Abstract：Inultrahighvacuumenvironment，Bayard-Alpertionizationvacuumgaugesgenerateioncurrentbyionizinggasmolecules.Thiscurrentsignalisveryweakandsusceptibletointerference.Thispaperintroducesaweaksignaldetec‐tionsystemforultra-highvacuummeasurement，whichcanmeetthewiderangecurrentsignaldetectionfrommAtosub-pA.Itiscomposedofmeasurementmodule，zeroadjustmentmoduleandprocessingmodule.Highprecisionamplifierandhighlyinsulatingrelayareselectedtorealizetheprecisionamplificationofweaksignals.Thesystemcanautomaticallycompletethemeasurementgearchange，zeroadjustment，dataprocessingandpressurecalculation.Thelowerlimitofmea‐surementupto10-13Awithgoodmeasurementlinearity.Ithasbeenappliedfortheaccuratemeasurementofionflowofultrahighvacuumgauges，showinggoodmeasurementstability.Keywords：widerangecurrentmeasurement；weaksignal；ultrahighvacuummeasurement；ionizationvacuumgauge0引言深空探测、量子物理、高精度极紫外光刻等前沿领域均对超高真空测量有着强烈的需求[1]。在超高真空测量的众多技术中，利...
