超高真空计微弱离子流检测技术研究姚鹏,李得天*,张虎忠,葛金国,马卓娅,成永军,阴怡媛(兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000)摘要:在超高真空环境下,Bayard-Alpert型电离真空计通过电离气体分子得到的离子流信号十分微弱,且极易受到干扰。介绍了一种用于超高真空测量的微弱信号检测系统,包括测量电路、调零电路与处理模块。该系统采用高精度放大器与高绝缘继电器,可以实现微弱信号的精密放大,满足mA级至亚pA级范围的宽量程电流信号检测;能够自动完成测量档位的切换、系统调零、数据处理与真空全压力值计算,测量下限可达10-13A量级,可用于超高真空计离子流的精确测量,具有良好的线性及稳定性。关键词:宽量程;微弱信号;超高真空测量;电离真空计中图分类号:TB772文献标志码:A文章编号:1006-7086(2023)02-0111-06DOI:10.3969/j.issn.1006-7086.2023.02.002ResearchontheWeakIonCurrentDetectionTechnologyofUltra-highVacuumGaugeYAOPeng,LIDetian*,ZHANGHuzhong,GEJinguo,MAZhuoya,CHENGYongjun,YINYiyuan(ScienceandTechnologyonVacuumTechnologyandPhysicsLaboratory,LanzhouInstituteofPhysics,Lanzhou730000,China)Abstract:Inultrahighvacuumenvironment,Bayard-Alpertionizationvacuumgaugesgenerateioncurrentbyionizinggasmolecules.Thiscurrentsignalisveryweakandsusceptibletointerference.Thispaperintroducesaweaksignaldetec‐tionsystemforultra-highvacuummeasurement,whichcanmeetthewiderangecurrentsignaldetectionfrommAtosub-pA.Itiscomposedofmeasurementmodule,zeroadjustmentmoduleandprocessingmodule.Highprecisionamplifierandhighlyinsulatingrelayareselectedtorealizetheprecisionamplificationofweaksignals.Thesystemcanautomaticallycompletethemeasurementgearchange,zeroadjustment,dataprocessingandpressurecalculation.Thelowerlimitofmea‐surementupto10-13Awithgoodmeasurementlinearity.Ithasbeenappliedfortheaccuratemeasurementofionflowofultrahighvacuumgauges,showinggoodmeasurementstability.Keywords:widerangecurrentmeasurement;weaksignal;ultrahighvacuummeasurement;ionizationvacuumgauge0引言深空探测、量子物理、高精度极紫外光刻等前沿领域均对超高真空测量有着强烈的需求[1]。在超高真空测量的众多技术中,利...