化学机械抛光液（CMP）氧化铝抛光液一、行业的界定与分类..................................................................................................................2（一）化学机械抛光..............................................................................................................21、化学机械抛光概念.....................................................................................................22、CMP工艺的基本原理..................................................................................................23、CMP技术所采用的设备及消耗品..............................................................................24、CMP过程....................................................................................................................25、CMP技术的优势........................................................................................................2（二）化学机械抛光液..........................................................................................................31、化学机械抛光液概念.................................................................................................32、化学机械抛光液的组成.............................................................................................33、化学机械抛光液的分类.............................................................................................34、CMP过程中对抛光液性能的要求............................................................................3（三）化学机械抛光液的应用领域.......................................................................................3二、原材料供应商..........................................................................................................................4三、化学机械抛光液行业现状.......................................................................................................4（一）抛光液行业现状..........................................................................................................41...
