第51卷第3期2023年3月华中科技大学学报(自然科学版)J.HuazhongUniv.ofSci.&Tech.(NaturalScienceEdition)Vol.51No.3Mar.2023MEMS重力仪温度、倾斜和气压扰动影响机制及其抑制方法研究高乐张健殷笑寒伍文杰(华中科技大学物理学院,湖北武汉430074)摘要从理论上分析了温度、倾斜、气压效应对微机电系统(MEMS)重力仪的影响机制,以5μGal的零偏稳定性为目标量化环境扰动控制需求,并分别提出三层主动温度控制、机械调平和数据补偿及真空腔封装方案抑制温度、倾斜及气压效应影响.实验结果表明:24h内重力敏感单元温度波动小于1.6mK,测温电路漂移0.08mK,两轴倾斜角度均小于±0.07mrad,气压波动变化小于0.3mPa.MEMS重力仪敏感探头集成环境抑制系统后静态本底噪声在1Hz处为1μGal·Hz-1/2,是国际精度最高的MEMS相对重力仪之一.关键词微机电系统(MEMS)重力仪;环境效应抑制;流动重力测量;温度效应;倾斜效应;气压效应中图分类号P716.81文献标志码A文章编号1671-4512(2023)03-0114-06Researchoninfluenceandsuppressionoftemperature,tiltandairpressuredisturbancesofMEMSgravimeterGAOLeZHANGJianYINXiaohanWUWenjie(SchoolofPhysics,HuazhongUniversityofScienceandTechnology,Wuhan430074,China)AbstractTheinfluencemechanismsoftemperature,tilt,andpressureeffectsontheMEMS(micro-electro-mechanicalsystem)gravimeterweretheoreticallyanalyzed.Thentherequirementsonenvironmentaldisturbancewasquantifiedaimingatazerobiasstabilityof5μGal.Forsuppressingtheinfluenceoftemperature,tilt,andpressureeffect,three-levelactivetemperaturecontrol,mechanicallevelingcombinedwithdatacompensationandencapsulationinsideavacuumchamberwereemployed,respectively.Theexperimentalresultsshowthatthevariationoftemperature,driftofthecircuitformeasuringtemperature,two-axistiltangleandpressurearelessthan1.6mK,0.08mK,±0.07mradand0.3mPawithin24h,respectively.Afterintegratedwiththeenvironmentalsuppressionsystem,thecalibratedself-noiseoftheMEMSgravimeteris1μGal·Hz-1/2at1Hz,whichisoneofthemostsensitiveMEMSrelativegravimetersreportedtodate.KeywordsMEMS(micro-electro-mechanicalsystem)gravimeter;suppressionofenvironmentaleffects;mobilegravimetry;effectoftemperature;e...