第51卷第3期2023年3月华中科技大学学报（自然科学版）J.HuazhongUniv.ofSci.&Tech.(NaturalScienceEdition)Vol.51No.3Mar.2023MEMS重力仪温度、倾斜和气压扰动影响机制及其抑制方法研究高乐张健殷笑寒伍文杰(华中科技大学物理学院，湖北武汉430074)摘要从理论上分析了温度、倾斜、气压效应对微机电系统(MEMS)重力仪的影响机制，以5μGal的零偏稳定性为目标量化环境扰动控制需求，并分别提出三层主动温度控制、机械调平和数据补偿及真空腔封装方案抑制温度、倾斜及气压效应影响．实验结果表明：24h内重力敏感单元温度波动小于1.6mK，测温电路漂移0.08mK，两轴倾斜角度均小于±0.07mrad，气压波动变化小于0.3mPa．MEMS重力仪敏感探头集成环境抑制系统后静态本底噪声在1Hz处为1μGal·Hz-1/2，是国际精度最高的MEMS相对重力仪之一．关键词微机电系统(MEMS)重力仪；环境效应抑制；流动重力测量；温度效应；倾斜效应；气压效应中图分类号P716.81文献标志码A文章编号1671-4512(2023)03-0114-06Researchoninfluenceandsuppressionoftemperature，tiltandairpressuredisturbancesofMEMSgravimeterGAOLeZHANGJianYINXiaohanWUWenjie(SchoolofPhysics，HuazhongUniversityofScienceandTechnology，Wuhan430074，China)AbstractTheinfluencemechanismsoftemperature，tilt，andpressureeffectsontheMEMS(micro-electro-mechanicalsystem)gravimeterweretheoreticallyanalyzed．Thentherequirementsonenvironmentaldisturbancewasquantifiedaimingatazerobiasstabilityof5μGal．Forsuppressingtheinfluenceoftemperature，tilt，andpressureeffect，three-levelactivetemperaturecontrol，mechanicallevelingcombinedwithdatacompensationandencapsulationinsideavacuumchamberwereemployed，respectively．Theexperimentalresultsshowthatthevariationoftemperature，driftofthecircuitformeasuringtemperature，two-axistiltangleandpressurearelessthan1.6mK，0.08mK，±0.07mradand0.3mPawithin24h，respectively．Afterintegratedwiththeenvironmentalsuppressionsystem，thecalibratedself-noiseoftheMEMSgravimeteris1μGal·Hz-1/2at1Hz，whichisoneofthemostsensitiveMEMSrelativegravimetersreportedtodate．KeywordsMEMS(micro-electro-mechanicalsystem)gravimeter；suppressionofenvironmentaleffects；mobilegravimetry；effectoftemperature；e...
