宇航计测技术2023年2023年8月第43卷第4期宇航计测技术JournalofAstronauticMetrologyandMeasurementAug.2023Vol.43No.4文章编号:1000-7202(2023)04-0048-06DOI:10.12060/j.issn.1000-7202.2023.04.08摆式电容倾角传感器的特性优化与数值模拟王福谦,殷勇(西南交通大学希望学院基础部,成都610400)摘要:为了研究计及传感器电极横向边缘效应的摆式电容倾角传感器的输出特性,将理论分析与计算机数值模拟相结合,利用保角变换法、格林函数法和软件MATLAB,讨论了摆式电容倾角传感器的电场,得到该传感器内静态电场的分布,给出其电容量随角位移变化关系式,绘制出该传感器的电容量与其角位移大小之间的变化曲线,并分析了影响该传感器线性度及灵敏度的因素。数值模拟结果表明,增大该传感器电极的面积、减小电极上端到悬挂点或固定点的距离及适度增大两固定电极的夹角,可提高其线性度和灵敏度,优化该传感器的输出特性。关键词:摆式电容倾角传感器;保角变换法;格林函数法;边缘效应;特性优化;数值模拟中图分类号:TP212文献标识码:ACharacteristicsOptimizationandNumericalSimulationofPendulousCapacitiveTiltSensorWANGFu-qian,YINYong(DepartmentofBasicCourses,HopeCollege,SouthwestJiaotongUniversity,Chengdu610400,China)Abstract:Inordertostudytheoutputcharacteristicsofthependulouscapacitivetiltsensortakingintoaccountthetransverseedgeeffectofthesensorelectrode,bycombingtheoreticalanalysiswithcomputernumericalsimulation,theelectricfieldofthetiltingcapacitanceinclinationsensorisdiscussedbyusingconformaltransformationmethod,GreenfunctionmethodandsoftwareMATLAB,thedistributionofthestaticelectricfieldisobtainedinthesensor,andtherelationshipbetweenitscapacitanceandangulardisplacementisgiven.Thevariationcurvebetweenthecapacitanceofthesensoranditsangulardisplacementisdrawn,andthefactorsaffectingthelinearityandsensitivityofthesensorareanalyzed.Thenumericalsimulationresultsshowthatincreasingtheareaofthesensorelectrode,reducingthedistancefromtheupperendoftheelectrodetothesuspensionpointorfixedpoint,andmoderatelyincreasingtheanglebetweenthetwofixedelectrodescanimproveitslinearityandse...
