机械设计与制造190MachineryDesign&Manufacture第8期2023年8月MPCVD金刚石薄膜设备冷却水温控系统的设计岳云峰1,任天平1,朱振伟1.2（1.郑州大学机械与动力工程学院，河南郑州450001;2.河南机电职业学院机电工程学院，河南郑州450001）摘要：为了解决MPCVD设备运行时冷却水手动调节方式存在的弊端，实现冷却水温的自动调节，设计了一种冷却水温度控制系统。该系统以STM32单片机为控制器的核心，步进电机为执行机构，采用BP神经网络PID控制算法。对系统进行了仿真和试验验证,结果表明：该系统能够实现MPCVD设备生产制备金刚石薄膜过程中冷却水温度的自动控制,与传统的PID控制相比，系统采用BP神经网络PID控制算法时超调量更小，控制精度更高，均方根误差和平均绝对误差更小，具有更好的温度控制效果。关键词：MPCVD设备；冷却水温度；自动控制；STM32控制器；增量式PID；BP神经网络中图分类号：TH16;TP273文献标识码：ADesignofCoolingWaterTemperatureControlSystemforYUEYun-feng’,RENTian-ping’,ZHUZhen-weil.2(1.SchoolofMechanicalandPowerEngineering,ZhengzhouUniversity,He'nanZhengzhou450001,China;2.CollegeofMechanicalandElectricalEngineering,He'nanVocationalCollegeofMechanicalandElectricalEngineering,He'nanZhengzhou450001,China)Abstract:lnordertosolvetheshortcomingsofthemanualcoolingwateradjustmentmethodwhentheMPCVDequipmentisrun-ning,andrealizetheautomaticadjustmentofthecoolingwatertemperature,acoolingwatertemperaturecontrolsystemisde-signed.ThesystemusesSTM32single-chipmicrocomputerasthecoreofthecontroller,steppermotorastheactuator,andusesBPneuralnetworkPIDcontrolalgorithm.Thesystemissimulatedandverifiedbyexperiments.TheresultsshowthatthesystemcanrealizetheautomaticcontrolofthecoolingwatertemperatureduringtheproductionofdiamondfilmsbytheMPCVDequip-ment.ComparedwiththetraditionalPIDcontrol,theovershootissmallerandthecontrolaccuracyishigherwhenthesystemadoptstheBPneuralnetworkPIDcontrolalgorithm.Therootmeansquareerrorandtheaverageabsoluteerroraresmaller,andthetemperaturecontroleffectisbetter.KeyWords:MPCVDEquipment;CoolingWaterTemperature;AutomaticControl;STM32Controller;Incre-mentalPID;BPNeuralNetwork文章编号：1001-3997(2023)08-0190-0...
