我国半导体硅片发展现状与展望DOI10.15302/J-SSCAE-2023.01.002我国半导体硅片发展现状与展望张果虎，肖清华，马飞（集成电路关键材料国家工程研究中心，北京100088）摘要：硅片是半导体关键的基础材料，我国半导体硅片对外依存度较高，增强硅片的自主保障能力，对提升我国半导体产业整体水平至关重要。本文重点围绕市场主流的8in、12in硅片，分析了全球半导体硅片的技术和产业发展现状，研判了全球半导体硅片产业未来的发展趋势，重点分析了我国半导体硅片的发展现状，指出我国半导体硅片在当前市场需求、宏观政策、配套能力、研发投入等利好因素下迎来难得的发展机遇，同时提出我国半导体硅片产业发展面临挑战，在此基础上，从进一步加强顶层设计和宏观规划、强化政策落实和政策持续性、协调支持产业链协同发展、布局研发集成电路先进制程用半导体硅片等方面提出对策建议，以期为推动我国半导体硅片向更高质量发展提供参考。关键词：半导体硅片；8in；12in；产业协同；先进制程中图分类号：TB383文献标识码：AProgressandProspectofSemiconductorSiliconWafersinChinaZhangGuohu,XiaoQinghua,MaFei(NationalEngineeringResearchCenterforKeyMaterialsofIntegratedCircuits,Beijing100088,China)Abstract:Siliconwafersarefundamentalmaterialsforsemiconductors.China’ssemiconductorsiliconwafersarehighlydependentonforeigntrade.EnhancingtheindependentguaranteecapabilityofsiliconwafersissignificantforimprovingtheoveralllevelofChina’ssemiconductorindustry.Thisstudyfocusesonthemarket-dominant8-inchand12-inchsiliconwafers,analyzesthedevelopmentstatusoftheglobalsemiconductorsiliconwafertechnologiesandindustry,andprospectsthedevelopmenttrendoftheindustry.ThestudyspecificallyfocusesonthedevelopmentstatusofChina’ssemiconductorsiliconwaferindustry,andpointsoutthattheindustryinChinaiscurrentlyfacingcriticaldevelopingopportunitiesconsideringthemarketdemand,macropolicies,supportingcapacities,R&Dinvestment,andotherfavorablefactors;meanwhile,itstillfaceschallenges.Furthermore,thefollowingmeasuresandsuggestionsareproposed:(1)furtherstrengtheningtop-leveldesignandmacroplanning,(2)strengtheningpolicyimplementationandsustainability,(3)supportingthecoordinateddevelopmentofthei...
