第36卷第5期2023年5月传感技术学报CHINESEJOURNALOFSENSORSANDACTUATORSVol.36No.5May2023项目来源:国家自然科学基金项目(51105348)收稿日期:2022-05-24修改日期:2022-06-27ResonantControlofThird⁃OrderPiezoelectricNano⁃PositioningStageBasedonRecursivePositivePositionFeedback∗WUZhiren,XUSu’an∗,FUYaqiong,WUZeyu(CollegeofMechanicalandElectricalEngineering,ChinaJiliangUniversity,HangzhouZhejiang310018,China)Abstract:Aclosed⁃loopcontrolmethodbasedonrecursivestructuredpositivepositionfeedbackcontroller(RPPF)isdesignedforthelowdampedresonancevibrationofthepiezoelectricnanopositioningstage.Theexcitationsignalinputstageisusedtoidentifythesys⁃tem,thezero⁃polecancellationmethodisusedtosimplifythethird⁃ordersystem,andtheclosed⁃loopcharacteristicequationissolvedbyusingtheFerrarimethod.Aimingattheproblemsthatthecontrollerhasmanyparametersandthepoleconfigurationisnotaccuratee⁃nough,themoth⁃flameoptimizationalgorithmisusedtoconfiguretheparametersoftheRPPFcontroller.Theexperimentalresultsshowthat,comparedwiththepositivepositionfeedbackcontroller(...