收稿日期:2022-10-22.*通信作者:陈直E-mail:chenzhi@stiei.edu.cn光电器件DOI:10.16818/j.issn1001-5868.2022102201紧凑型纳米薄膜铌酸锂复合波导光电子可逆逻辑门陈直*(上海电子信息职业技术学院通信与信息工程学院,上海201411)摘要:基于纳米薄膜铌酸锂与氮化硅复合波导结构,构建了光电子可逆逻辑门,应用于神经形态光子学和量子计算。该光电子可逆逻辑门的主体由两个马赫-曾德尔调制器级联而成,结构紧凑,全长仅为4.4mm,是普通质子交换铌酸锂调制器长度的百分之一。工作在1.55μm波长时,该马赫-曾德尔调制器仅需4.9V电压就可以实现一次完整的功率交换,很好地与CMOS工艺相兼容。器件特性研究表明,该光电子可逆逻辑门能够实现可逆逻辑运算功能。此外,该器件在1.4~1.6μm波长范围内,插入损耗均值为0.6dB,输出端口的最小串扰为-47dB,消光比的最大值为41dB;在4~6V电压范围内,插入损耗均值为0.63dB,输出端口的最小串扰为-26dB,消光比的最大值为22dB,显示出了良好的响应特性。关键词:纳米薄膜铌酸锂;铌酸锂-氮化硅复合波导;马赫-曾德尔调制器;可逆逻辑运算中图分类号:TN256文章编号:1001-5868(2023)01-0032-07CompactPhotoelectronicReversibleLogicGateBasedonNano-filmLithiumNiobateHybridWaveguideCHENZhi(ShanghaiTechnicalInstituteofElectronicsInformation,Shanghai201411,CHN)Abstract:Aphotoelectronicreversiblelogicgateappliedtoneuromorphicphotonicsandquantumcomputationwasconstructedwithahybridnano-thinfilmlithiumniobateandsiliconnitridewaveguide.ThemainstructureofthephotoelectronicreversiblelogicgatewascomposedoftwocascadedMach-Zehndermodulators.Thetotallengthofthegatewasonly4.4mm,beingonlyonehundredthofthelengthofacommonprotonexchangelithiumniobatemodulator.Operatingatthewavelengthof1.55μm,theMach-Zehndermodulatorachievedacompletepowerexchangewithonly4.9VvoltagethatwaswellcompatiblewithCMOSprocess.Thedevicecharacteristicsshowthatthephotoelectronicreversiblelogicgatecanrealizereversiblelogicoperation.Moreover,inthewavelengthrangeof1.4μmto1.6μm,themeaninsertionlossofthedeviceis0.6dB,theminimumcross-talkoftheoutputportis-47dB,andthemaximumextinctionratiois41dB.Inthevoltagerangeof4Vto6V,themeaninsertionlossis0.63dB,theminimumcross-talkoftheoutputportis-26dB,an...
