文章编号:1002-2082(2023)01-0188-07矩形波宽带通滤光膜研究董莹1,张艳茹2,胡荣1,刘永强1,杨崇民1(1.西安应用光学研究所,陕西西安710065;2.北京科益虹源光电技术有限公司,北京102605)¯τ摘要:对矩形波宽带通滤光片进行了深入研究,提出了一种设计、制备矩形波宽带通滤光片的方法。使用该方法设计并制备了400nm~1100nm波段,中心波长λ0=515nm,透射带λ=λ0±25nm,透射带平均透射率≥92%,截止带λ=400nm~475nm、λ=555nm~1100nm,截止带透射率小于0.1%的矩形波宽带通OD3-A滤光片。对样片光谱进行了测试,结果满足需求。该方法设计、制备矩形波宽带通滤光片克服了F-P型窄带滤光膜监控精度要求高、通带宽带窄、成本高以及传统长、短波截止膜组合方式膜层总厚度过大、通带透过率低、波形矩形度差的缺点。关键词:光学薄膜;带通滤光膜;矩形波;吸光性中图分类号:TN305.8;O484.4文献标志码:ADOI:10.5768/JAO202344.0105002Researchonrectangular-wavebroadbandpassfilterfilmDONGYing1,ZHANGYanru2,HURong1,LIUYongqiang1,YANGChongmin1(1.Xi'anInstituteofAppliedOptics,Xi'an710065,China;2.BeijingRSLaserOpto-ElectronicsTechnologyCo.,Ltd.,Beijing102605,China)Abstract:Amethodfordesigningandpreparingtherectangular-wavebroadbandpassfilterwasputforwardafteradeepstudy.Arectangular-waveOD3-Abroadbandpassfilterwasdesignedandpreparedwiththismethod,withitscenterwavelengthλ0=515nmintheworkingrangeof400nm~1100nm.Andthemeantransmittanceofthesampleinitspass-bandofλ0±25nmwasgreatthanorequalto92.7%,meanwhilethetransmittanceinthecut-offbandλrangingfrom400nm~475nmandλrangingfrom555nm~1100nmwaslessthan0.1%.Thetransmittanceofthethinfilmsamplewastested,andthespectrummettherequirements.Therectangular-wavebroadbandpassfilterdesignedandpreparedbythismethodovercamethedisadvantagesofhighprecisionrequirementsofFabry-Perotinterferometernarrow-bandfilterfilmmonitoring,narrowpass-bandbroadband,highcost,overlargetotalthickness,lowpass-bandtransmittanceandpoorwaveformrectangularityinthetraditionalcombinationwayoflongandshortwavecut-offfilms.Keywords:opticalthinfilm;band-passfilterfilm;rectangularwave;opticaldensity引言带通滤光膜是指在一定波段内...