收稿日期:2022-10-14.基金项目:辽宁省教育厅面上项目(LJKMZ20221429).*通信作者:王玉新E-mail:yuxinwang178@sina.com材料、结构及工艺DOI:10.16818/j.issn1001-5868.2022101403Al/N共掺杂TiO2薄膜的制备及光学性能王泽文,赵莉,蔺冬雪,王玉新*(辽宁师范大学物理与电子技术学院,辽宁大连116029)摘要:采用溶胶-凝胶旋涂法(Sol-GelSpin-CoatingMethod)制备了Al掺杂量为3.00at%,N掺杂量分别为6.00at%,7.00at%,8.00at%和9.00at%的Al/N共掺杂TiO2薄膜样品。对样品测试的结果表明,共掺杂样品依旧保留了TiO2的基本结构,并且Al/N共掺杂样品的晶粒尺寸有不同程度的减小,使样品表面得以修饰,变得更加均匀、平整。共掺杂样品吸收边都出现了不同程度的红移,在紫外光区以及可见光区的吸光性都有所增强。N掺杂量为7.00at%时,(101)衍射峰值最大,峰型最尖锐,所得到的TiO2薄膜的光学性能最好。共掺杂后的样品与本征TiO2相比带隙值都有所减小,且最小值为2.873eV。以上结果表明Al/N共掺杂TiO2薄膜使其光学性能得到了改善。关键词:Al/N共掺杂;TiO2薄膜;光学性能;溶胶-凝胶法中图分类号:TB383.2;TQ134.1+1文章编号:1001-5868(2023)01-0087-05PreparationandOpticalPropertiesofAluminumandNitrogenCo-dopedTiO2ThinFilmWANGZewen,ZHAOLi,LINDongxue,WANGYuxin(SchoolofPhysicsandElectronicTechnology,LiaoningNormalUniversity,Dalian116029,CHN)Abstract:Inthisstudy,basedonthesol-gelspincoatingmethod,aluminumandnitrogenco-dopedTiO2filmsampleswerepreparedwithaluminumdopingamountof3.00at%,andnitrogendopingamountof6.00at%,7.00at%,8.00at%,and9.00at%,respectively.ThetestresultsofthesamplesshowthatthebasicstructureofTiO2isstillretainedintheco-dopedsamples,andthegrainsizeofaluminumandnitrogenco-dopedsamplesisreducedtodifferentdegrees,whichmakesthesurfaceofthesamplesmodifiedtobecomemoreuniformandflatcomparedwiththatoftheundoped.Theco-dopedsamplesshoweddifferentdegreesofredshiftandenhancedabsorbanceinbothUVandvisibleregions.Whenthedopingamountofnitrogenis7.00at%,thediffractionpeakof(101)isthelargest,thepeaktypeisthesharpiest,andtheobtainedTiO2filmhasthebestopticalperformance.ComparedwiththeeigenstateTiO2,thebandgapvaluesoftheco-dopedsamplesaredecreased,andtheminimumvalueis2.873eV.Theaboveresultsindi...
