新技术新工艺2023年第7期60《新技术新工艺》试验与研究U型波浪结构热沉的流动与热性能分析*臧鲁浩,王俊超,曹明轩,甘宏海,高一伟(五邑大学智能制造学部,广东江门529020)摘要:为了保证高功率半导体激光器能够有更稳定的工作温度,设计了一款双层U型波浪微通道热沉,通过模拟的方法研究该结构的流动和传热特性。首先,比较了传统直微通道热沉(SMCHS)和波浪微通道热沉(WMCHS)的局部换HTC、压降和温度均匀性。其次,采用单一变量方法研究了不同参数(泵功、波浪的振幅和波长)对WMCHS中温度分布、压降和迪恩涡流变化的影响。结果表明,和SMCHS相比,WMCHS的上段和下段的局部HTC有所提高,WMCHS流道内产生回流,而且WMCHS的温度均匀性更好。此外,当波长λ=250μm时,小振幅(A=30μm)的WMCHS中迪恩涡的持续时间最长,努塞尔数(Nu)达到最大。当振幅A>80μm时,Nu在波长接近1000μm时增加到最大值。研究内容为半导体激光器波浪形通道散热器的优化原理提供了仿真依据,同时对其他微电子器件的散热具有参考价值。关键词:热沉;波浪微流道;温度均匀性;热阻;压降;迪恩涡中图分类号:TK124文献标志码:AAnalysisofFlowandThermalPerformanceforU-shapedWavyStructureHeatSinkZANGLuhao,WANGJunchao,CAOMingxuan,GANHonghai,GAOYiwei(FacultyofIntelligentManufacturing,WuyiUniversity,Jiangmen529020,China)Abstract:Inordertoensureamorestableoperatingtemperatureforhighpowersemiconductorlasers,adouble-layerU-shapedwavemicrochannelheatsinkwasdesigned,andtheflowandheattransfercharacteristicsofthestructurewerestudiedbysimulation.Firstly,thelocalheattransfercoefficient(HTC)ofpressuredroppingandtemperatureuniformityofconventionalstraightmicrochannelheatsink(SMCHS)andwavymicrochannelheatsink(WMCHS)werecompared.Sec-ondly,asinglevariableapproachwasusedtostudytheeffectsofdifferentparameters(pumpingpower,amplitude,andwavelengthofwavystructure)onthetemperaturedistribution,pressuredrop,andDeanvortexvariationintheWMCHS.TheresultsshowedthatcomparedwithSMCHS,WMCHShadincreasedlocalHTCintheupperandbottomsections,backflowwasgeneratedintheWMCHSchannel,andthetemperatureuniformityofWMCHSwasbetter.Furthermore,Deanvorticesinthesmallamplitude(A=30μm)WMCHShadthelongestdurationwhenthewavelengthλ=250μm,andtheNusseltnumb...