SignalProcess&System信号与系统传感器世界2023.05Vol.29NO.05Total33531注：国家自然科学基金资助项目（No.61372016）；北京市教育委员会科技计划重点项目（No.KZ201711232030）；传感器北京市重点实验室开放课题基金资助项目（No.20220GKF002）摘要：MEMS陀螺在导航、控制、测量等领域的应用越来越广泛，而激励信号的选取直接影响着陀螺的检测灵敏度。文章首先通过理论分析了陀螺的结构特性，确定了影响信号检测灵敏度因素；然后对陀螺信号处理电路中的激励信号部分进行实验研究；最终选取了适合该陀螺的激励信号。为使无驱动MEMS陀螺具有较高的灵敏度，实验研究了不同幅值、频率和波形种类的激励信号对其产生的影响，为选取合适的激励信号提供了依据。实验结果表明：选择幅值为5V、频率为139kHz、占空比为80%左右的方波激励信号为最佳方案，能够有效地提高无驱动MEMS陀螺的输出灵敏度。关键词：无驱动；激励信号；灵敏度；MEMS陀螺中图分类号：TP203.3文献标志码：A文章编号：1006-883X(2023)05-0031-05收稿日期：2023-04-15DOI:10.16204/j.sw.issn.1006-883X.2023.05.006InfluenceofExcitationSignalonOutputSensitivityofDriverlessMEMSGyroscopeXUCong1,ZHANGWei1,GUOZilong2(1.SchoolofInstrumentScienceandOptoelectronicEngineering,BeijingUniversityofInformationTechnology,Beijing100101,China;2.SchoolofOptoelectronicEngineering,Xi'anUniversityofTechnology,Xi'an710021,China)Abstract:TheincreasinglywidespreadapplicationofMEMSgyroscopesinfieldssuchasnavigation,control,andmeasurement,theselectionofexcitationsignalsdirectlyaffectsthedetectionsensitivityofgyroscopes.Thearticlefirstanalyzesthestructuralcharacteristicsofthegyroscopethroughtheoreticalanalysis,anddeterminesthefactorsthataffectthesensitivityofsignaldetection;Then,experimentalresearchwasconductedontheexcitationsignalpartofthegyroscopesignalprocessingcircuit,andtheexcitationsignalsuitableforthegyroscopewasultimatelyselected.InordertoimprovethesensitivityofthedriverlessMEMSgyroscope,theeffectsofexcitationsignalswithdifferentamplitudes,frequencies,andwaveformtypesonitsgenerationwereexperimentallystudied,providingabasisforselectingappropriateexcitationsignals.Theexperimentalresultsshowthatselectinga...
