第44卷第4期2023年4月激光杂志LASERJOURNALVol.44,No.4April,2023http∶//www.laserjournal.cn收稿日期:2022-07-12基金项目:甘肃省高等学校创新基金项目(No.2021B-305)作者简介:王春梅(1988-),女,硕士,讲师,研究方向:光学仪器、测控系统的研究。基于激光干涉的高分辨率精密位移测量研究王春梅,张总,王辉兰州工业学院,兰州730050摘要:由于高分辨率精密位移测量过程中调制深度波动和载波相位延迟,导致相位解调中存在误差,致使测量效果较差,测量时间较长,提出基于激光干涉的高分辨率精密位移测量方法。分析激光干涉原理和位移测量原理,获取位移测量误差产生的原因,采用相位生成载波反正切解调方法解调干涉信号,通过离散卡尔曼滤波修正相位解调后正交信号的幅值和偏置,补偿相位解调误差,实现高分辨率精密位移测量。实验结果表明,所提方法的测量波动均值稳定在±1.5nm之间,能够有效地稳定测量能力、减小测量误差、缩短测量时间。关键词:激光干涉;高分辨率精密位移测量;相位生成载波解调;相位解调误差补偿;卡尔曼滤波中图分类号:TN247文献标识码:Adoi:10.14016/j.cnki.jgzz.2023.04.097ResearchonhighresolutionprecisiondisplacementmeasurementbasedonlaserinterferometryWANGChunmei,ZHANGZong,WANGHuiLanzhouInstituteOfTechnology,Lanzhou730050,ChinaAbstract:Duetothemodulationdepthfluctuationandcarrierphasedelayintheprocessofhigh-resolutionpreci-siondisplacementmeasurement,thereareerrorsinphasedemodulation,resultinginpoormeasurementeffectandlongmeasurementtime.Ahigh-resolutionprecisiondisplacementmeasurementmethodbasedonlaserinterferometryispro-posed.Analyzetheprincipleoflaserinterferenceanddisplacementmeasurement,obtainthecauseofdisplacementmeasurementerror,demodulatetheinterferencesignalbyusingthephasegenerationcarrierarctangentdemodulationmethod,correcttheamplitudeandoffsetofthequadraturesignalafterphasedemodulationthroughdiscreteKalmanfil-ter,compensatethephasedemodulationerror,andrealizehigh-resolutionprecisiondisplacementmeasurement.Theexperimentalresultsshowthatthemeanvalueofthemeasurementfluctuationoftheproposedmethodisstablebetween±1.5nm,whichcaneffectivelystabilizethemeasurementability,reducethemeasurementerrorandshortenthemeasurementtime.Keywords:l...
