IEC62047-25Edition1.02016-08INTERNATIONALSTANDARDNORMEINTERNATIONALESemiconductordevices–Micro-electromechanicaldevices–Part25:SiliconbasedMEMSfabricationtechnology–Measurementmethodofpull-pressandshearingstrengthofmicrobondingareaDispositifsàsemiconducteurs–Dispositifsmicroélectromécaniques–Partie25:TechnologiedefabricationdeMEMSàbasedesilicium–Méthodedemesuredelarésistanceàlatraction-compressionetaucisaillementd'unemicrozonedebrasureIEC62047-25:2016-08(en-fr)®colourinsideTHISPUBLICATIONISCOPYRIGHTPROTECTEDCopyright©2016IEC,Geneva,SwitzerlandAllrightsreserved.Unlessotherwisespecified,nopartofthispublicationmaybereproducedorutilizedinanyformorbyanymeans,electronicormechanical,includingphotocopyingandmicrofilm,withoutpermissioninwritingfromeitherIECorIEC'smemberNationalCommitteeinthecountryoftherequester.IfyouhaveanyquestionsaboutIECcopyrightorhaveanenquiryaboutobtainingadditionalrightstothispublication,pleasecontacttheaddressbeloworyourlocalIECmemberNationalCommitteeforfurtherinformation.Droitsdereproductionréservés.Saufindicationcontraire,aucunepartiedecettepublicationnepeutêtrereproduiteniutiliséesousquelqueformequecesoitetparaucunprocédé,électroniqueoumécanique,ycomprislaphotocopieetlesmicrofilms,sansl'accordécritdel'IECouduComiténationaldel'IECdupaysdudemandeur.Sivousavezdesquestionssurlecopyrightdel'IECousivousdésirezobtenirdesdroitssupplémentairessurcettepublication,utilisezlescoordonnéesci-aprèsoucontactezleComiténationaldel'IECdevotrepaysderésidence.IECCentralOfficeTel.:+412291902113,ruedeVarembéFax:+41229190300CH-1211Geneva20info@iec.chSwitzerlandwww.iec.chAbouttheIECTheInternationalElectrotechnicalCommission(IEC)istheleadingglobalorganizationthatpreparesandpublishesInternationalStandardsforallelectrical,electronicandrelatedtechnologies.AboutIECpublicationsThetechnicalcontentofIECpublicationsiskeptunderconstantreviewbytheIEC.Pleasemakesurethatyouhavethelatestedition,acorrigendaoranamendmentmighthavebeenpublished.IECCatalog...
