第36卷第1期2023年1月传感技术学报CHINESEJOURNALOFSENSORSANDACTUATORSVol.36No.1Jan.2023项目来源:江苏省“双创计划”项目;江苏省“六大人才高峰”高层次人才选拔培育资助计划项目(XCL-144)收稿日期:2022-04-06修改日期:2022-05-07DesignandResearchofIEPEPiezoelectricVibrationSensorswithAnti⁃ElectromagneticInterferenceandWideFrequencyResponse∗WANGTianzi∗,ZHANGJianwen,ZHANGLei,BAIGe(SuzhouChangfengAvionicsCo.,Ltd.,SuzhouJiangsu215151,China)Abstract:Improvingthefrequencyresponserangeandanti⁃electromagneticinterferenceabilityofIEPEpiezoelectricvibrationsensorsisthekeytoitsapplicationintheaviationfield.Basedonthetheoreticalresearch,thestructure,performanceandchargeconversioncircuitofthesensoraredesigned.TheANSYSfiniteelementsimulationsoftwareisusedtoassistthefunctionalanalysis,andthefunctionalperformanceofthesensorismeasured.TheIEPEpiezoelectricvibrationsensorswiththesensitivityof10×(1+5%)mV/gn,thesensitiv⁃itydeviationof±10%inthewidefrequencyresponserangeof5Hz~25000Hz,andpossessinggoodanti⁃electromagneticinterferenceabilityaredeveloped,whichmeetthevibrationmeasure...