IEC60204-33Edition1.02009-12INTERNATIONALSTANDARDNORMEINTERNATIONALESafetyofmachinery–Electricalequipmentofmachines–Part33:RequirementsforsemiconductorfabricationequipmentSécuritédesmachines–Equipementélectriquedesmachines–Partie33:Exigencespourleséquipementsdefabricationdessemi-conducteursIEC60204-33:2009®LICENSEDTOMECONLIMITED-RANCHI/BANGALORE,FORINTERNALUSEATTHISLOCATIONONLY,SUPPLIEDBYBOOKSUPPLYBUREAU.THISPUBLICATIONISCOPYRIGHTPROTECTEDCopyright©2009IEC,Geneva,SwitzerlandAllrightsreserved.Unlessotherwisespecified,nopartofthispublicationmaybereproducedorutilizedinanyformorbyanymeans,electronicormechanical,includingphotocopyingandmicrofilm,withoutpermissioninwritingfromeitherIECorIEC'smemberNationalCommitteeinthecountryoftherequester.IfyouhaveanyquestionsaboutIECcopyrightorhaveanenquiryaboutobtainingadditionalrightstothispublication,pleasecontacttheaddressbeloworyourlocalIECmemberNationalCommitteeforfurtherinformation.Droitsdereproductionréservés.Saufindicationcontraire,aucunepartiedecettepublicationnepeutêtrereproduiteniutiliséesousquelqueformequecesoitetparaucunprocédé,électroniqueoumécanique,ycomprislaphotocopieetlesmicrofilms,sansl'accordécritdelaCEIouduComiténationaldelaCEIdupaysdudemandeur.SivousavezdesquestionssurlecopyrightdelaCEIousivousdésirezobtenirdesdroitssupplémentairessurcettepublication,utilisezlescoordonnéesci-aprèsoucontactezleComiténationaldelaCEIdevotrepaysderésidence.IECCentralOffice3,ruedeVarembéCH-1211Geneva20SwitzerlandEmail:0Hinmail@iec.chWeb:1Hwww.iec.chAbouttheIECTheInternationalElectrotechnicalCommission(IEC)istheleadingglobalorganizationthatpreparesandpublishesInternationalStandardsforallelectrical,electronicandrelatedtechnologies.AboutIECpublicationsThetechnicalcontentofIECpublicationsiskeptunderconstantreviewbytheIEC.Pleasemakesurethatyouhavethelatestedition,acorrigendaoranamendmentmighthavebeenpublished.�CatalogueofIECpublications:2Hwww.iec.ch/searchpubTheIECon-lineCatalogueenablesyoutosearchbyavarietyo...
