(总第297期)电子工业专用设备EquipmentforElectronicProductsManufacturingEEPMDec.2022收稿日期:2022-11-16基于模糊PID控制的电气设备温度控制系统设计与实现于静,戴豪(北京烁科精微电子装备有限公司,北京100176)摘要:为实现对电气设备温度的精准控制,保证电气设备运行的安全性与可靠性,以电气设备为例,从硬件与软件两个方面,开发了一种可用于电气设备的温度控制系统。选择SHT21-46980型号温度传感器、OM49-680型号控制器作为系统主要硬件设备,在硬件设备的支撑下,建立了电气设备温度模糊PID控制目标函数,该设计基于温度输入子集模糊化的电气设备温度控制程序。通过对比实验证明,该系统在实际应用中可缩短控制时间,保证电气设备温度一直处于预设范围内。关键词:模糊PID控制;电气设备;温度控制系统;硬件设计;软件设计中图分类号:TP302.1文献标志码:A文章编号:1004-4507(2022)06-0012-05DesignandImplementationofTemperatureControlSystemforElectricalEquipmentBasedonFuzzyPIDControlYUJing,DAIHao(BeijingSemicoreMicroelectronicsEquipmentCo.,Ltd.,Beijing100176,China)Abstract:Inordertorealizeprecisetemperaturecontrolforelectricalequipmentandensuresafetyandreliabilityofelectricalequipmentoperation,takingelectricalequipmentasanexample,atemperaturecontrolsystemisdesignedfromtheaspectsofhardwareandsoftware.SelectingSHT21-46980typetemperaturesensorandOM49-680typecontrollerasthemainhardwareequipmentofthesystem,withthesupportofhardwareequipment,theobjectivefunctionofelectricalequipmenttemperaturefuzzyPIDcontrolisestablished,anddesignedtemperaturecontrolprogramforelectricalequipmentbasedonfuzzytemperatureinputsubset.Bymeansofcomparativeexperiments,itisprovedthatthedesignedsystemcanshortenthecontroltimeinpracticalapplicationandensurethatthetemperatureofelectricalequipmentisalwayswithinthepresetrange.Keywords:FuzzyPIDcontrol;Electricalequipment;Temperaturecontrolsystem;Hardwaredesign;Softwaredesign半导体制造工艺与设备12(总第297期)电子工业专用设备EquipmentforElectronicProductsManufacturingEEPMDec.2022为避免电气设备在运行中受到外界环境的干扰,通常会将电气设备内置在结构组件柜内,通过这种方式可避免电气设备运行...