CVD多层涂层断裂方式及失效的微观机理分析赵溪朦孙本哲祁阳（东北大学材料科学与工程学院材料物理与化学教研室，辽宁沈阳110819）摘要本文以TiN/Al2O3/TiAlCNO/TiCN/TiNCVD多层涂层为对象研究了CVD多层涂层的断裂方式和失效机理。采用扫描电镜和透射电镜观察多层涂层的断裂形貌和涂层界面微观组织，结果表明多层涂层的断裂方式为沿晶断裂和穿晶断裂；Al2O3/TiAlCNO/TiCN涂层界面微观组织疏松有微裂纹等缺陷。采用电子探针分析了多层涂层界面的元素扩散行为，结果表明TiN/基体界面依靠机械结合、吸附结合、扩散结合和化学结合，界面强度高；Al2O3/TiAlCNO界面仅依靠吸附结合，界面强度低。通过计算得出多层涂层中存在残余热应力，它使多层涂层中产生较多微裂纹。因此，多层涂层失效源于涂层中微裂纹，界面结合强度低会加速涂层脱落。关键词断裂方式；失效机理；多层涂层；涂层界面；微观缺陷FractureModeandFailureMechanismofMultilayerCVDCoatingsZhaoXimengSunBenzheQiYang（InstituteofMaterialsPhysicsandChemistry,SchoolofMaterialsScienceandEngineering,NortheasternUniversity,ShenyangLiaoning110819,China）ABSTRACTThefracturemodeandfailuremechanismofTiN/Al2O3/TiAlCNO/TiCN/TiNmultilayerCVDcoatingswerestudiedinthispaper.ThefracturemorphologyandtheinterfacemicrostructureofmultilayerCVDcoatingswereobservedbythescanningelectronmicroscope(SEM)andthetransmissionelectronmicroscope(TEM).TheresultsshowthatthefracturesofmultilayerCVDcoatingsareintergranularfracturesandtrans-granularfractures,andtherearemicro-defects,suchasloosemicrostructureandmicrocracks,attheinterfacesofAl2O3/TiAlCNO/TiCNcoatings.Theelementdiffusionbehaviorofthemultilayercoatinginterfacewasanalyzedbytheelectronprobe,andtheresultsindicatethatthebondingoftheTiN/matrixinterfacereliesonthemechanicalbond,adsorptionbond,diffusionalbond,andchemicalbond,andtheinterfacialstrengthishigh.ThebondingoftheAl2O3/TiAlCNOinterfacesdependsontheadsorptionbond,andtheinterfacialstrengthislow.Inaddition,calculationsshowthatresidualthermalstressexistsinmultilayercoatings,whichleadstomultiplemicrocracksinthemultilayercoatings.Therefore,itcanbeconcludedthatthemultilayercoatingsfailduetothemicrocracksint...
