Designation:F1711−96(Reapproved2008)StandardPracticeforMeasuringSheetResistanceofThinFilmConductorsforFlatPanelDisplayManufacturingUsingaFour-PointProbeMethod1ThisstandardisissuedunderthefixeddesignationF1711;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.1.Scope1.1Thispracticedescribesmethodsformeasuringthesheetelectricalresistanceofsputteredthinconductivefilmsdepos-itedonlargeinsulatingsubstrates,usedinmakingflatpanelinformationdisplays.Itisassumedthatthethicknessoftheconductivethinfilmismuchthinnerthanthespacingofthecontactprobesusedtomeasurethesheetresistance.1.2ThisstandardisintendedtobeusedwithTestMethodF390.1.3Sheetresistivityintherange0.5to5000ohmspersquaremaybemeasuredbythispractice.Thesheetresistanceisassumeduniformintheareabeingprobed.1.4Thispracticeisapplicabletoflatsurfacesonly.1.5Probepinspacingsof1.5mmto5.0mm,inclusive(0.059to0.197ininclusive)arecoveredbythispractice.1.6Themethodinthispracticeispotentiallydestructivetothethinfilmintheimmediateareainwhichthemeasurementismade.Areastestedshouldthusbecharacteristicofthefunctionalpartofthesubstrate,butshouldberemotefromcriticalactiveregions.Themethodissuitableforcharacteriz-ingdummytestsubstratesprocessedatthesametimeassubstratesofinterest.1.7ThevaluesstatedinSIunitsaretoberegardedasthestandard.Thevaluesgiveninparenthesesareforinformationonly.1.8Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappro-priatesafetyandhealthpracticesanddeterminetheapplica-bilityofregulatorylimitationspriortouse.2.ReferencedDocuments2.1ASTMStandards:2F390TestMethodforSheetResistanceofThinMetallicFilmsWithaCollinearFour-ProbeArray3.Terminology3.1Definitions:3.1.1FordefinitionsoftermsusedinthispracticeseeTestMethodF390.4.Summaryof...
