Designation:F1376−92(Reapproved2012)StandardGuideforMetallurgicalAnalysisforGasDistributionSystemComponents1ThisstandardisissuedunderthefixeddesignationF1376;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.INTRODUCTIONSemiconductorcleanroomsareservicedbyhigh-puritygasdistributionsystems.Thisguidepresentsaprocedurethatmaybeappliedfortheevaluationofoneormorecomponentsconsideredforuseinsuchsystems.1.Scope1.1Thisguidecoverscorrosionresistantmetallicalloysofthegeneralclassstainlesssteel,containingchromium,nickel,manganese,andsiliconasmajoralloyingadditionsandpossi-blymolybdenum,thatarequalifiedorspecifiedforthemate-rialsofcomponentsusedinhigh-puritygassupplysystemsforthesemiconductorindustry.Thisguideisprimarilyintendedfortestingtodetermineconformancetoapplicablecompositionandmetallurgicalspecificationsasstatedinsupplierproductspecificationsorcustomerpurchasespecifications,orboth.1.2Elementsanalyzedandreportedinthisguideareasfollows:1.2.1Thealloyingadditionschromium,nickel,andmolyb-denum(ifspecifiedinalloy,asintype316L),1.2.2Theminorelementsandresidualsmanganese,silicon,copper,cobalt,andstabilizerssuchastitaniumandcolumbium(niobium),ifpresent,1.2.3Carbon,sulfurandphosphorus,1.2.4Nitrogenandoxygengases,1.2.5Anyadditionalminorelementadditionsthatmaybemadeaspartofthemeltingandcastingpractice,suchasaluminumandcalcium,1.2.6Availablestandardanalyticalandreportingtechniquesaredescribedfortheseelements.1.3Metallurgicalcharacteristicstobeanalyzedandreportedareinclusioncontents,grainstructure,mechanicalproperties,andintergranularcorrosionsusceptibility.1.4Limitations:1.4.1ThisguideislimitedtocorrosionresistantmetalalloysofthegeneralclassstatedintheScope.1.4.2Thetestmethodscitedinthisguidearenotintendedtoprecludetheuseofothergenerallyacceptedtechniquesofdemonstratedequival...
