Designation:D5127−13StandardGuideforUltra-PureWaterUsedintheElectronicsandSemiconductorIndustries1ThisstandardisissuedunderthefixeddesignationD5127;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.1.Scope1.1Thisguideprovidesrecommendationsforwaterqualityrelatedtoelectronicsandsemiconductor-industrymanufactur-ing.Sevenclassificationsofwateraredescribed,includingwaterforlinewidthsaslowas0.032micron.Inallcases,therecommendationsareforwateratthepointofdistribution(POD).1.2Waterisusedforwashingandrinsingofsemiconductorcomponentsduringmanufacture.Waterisalsousedforclean-ingandetchingoperations,makingsteamforoxidationofsiliconsurfaces,preparingphotomasks,anddepositinglumi-nescentmaterials.Otherapplicationsareinthedevelopmentandfabricationofsolid-statedevices,thin-filmdevices,com-municationlasers,light-emittingdiodes,photo-detectors,printedcircuits,memorydevices,vacuum-tubedevices,orelectrolyticdevices.1.3Usersneedingwaterqualitiesdifferentfromthosede-scribedhereshouldconsultotherwaterstandards,suchasSpecificationD1193andGuideD5196.1.4Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappro-priatesafetyandhealthpracticesanddeterminetheapplica-bilityofregulatorylimitationspriortouse.2.ReferencedDocuments2.1ASTMStandards:2D1129TerminologyRelatingtoWaterD1193SpecificationforReagentWaterD1976TestMethodforElementsinWaterbyInductively-CoupledArgonPlasmaAtomicEmissionSpectroscopyD2791TestMethodforOn-lineDeterminationofSodiuminWaterD3919PracticeforMeasuringTraceElementsinWaterbyGraphiteFurnaceAtomicAbsorptionSpectrophotometryD4191TestMethodforSodiuminWaterbyAtomicAbsorp-tionSpectrophotometryD4192TestMethodforPotassiuminWaterbyAtomicAbsorptionSpectrophotometryD4327TestMethodforAnionsinWa...
