Designation:D5127−13(Reapproved2018)StandardGuideforUltra-PureWaterUsedintheElectronicsandSemiconductorIndustries1ThisstandardisissuedunderthefixeddesignationD5127;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.1.Scope1.1Thisguideprovidesrecommendationsforwaterqualityrelatedtoelectronicsandsemiconductor-industrymanufactur-ing.Sevenclassificationsofwateraredescribed,includingwaterforlinewidthsaslowas0.032µm.Inallcases,therecommendationsareforwateratthepointofdistribution(POD).1.2Waterisusedforwashingandrinsingofsemiconductorcomponentsduringmanufacture.Waterisalsousedforclean-ingandetchingoperations,makingsteamforoxidationofsiliconsurfaces,preparingphotomasks,anddepositinglumi-nescentmaterials.Otherapplicationsareinthedevelopmentandfabricationofsolid-statedevices,thin-filmdevices,com-municationlasers,light-emittingdiodes,photo-detectors,printedcircuits,memorydevices,vacuum-tubedevices,orelectrolyticdevices.1.3Usersneedingwaterqualitiesdifferentfromthosede-scribedhereshouldconsultotherwaterstandards,suchasSpecificationD1193andGuideD5196.1.4Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappro-priatesafety,health,andenvironmentalpracticesanddeter-minetheapplicabilityofregulatorylimitationspriortouse.1.5Thisinternationalstandardwasdevelopedinaccor-dancewithinternationallyrecognizedprinciplesonstandard-izationestablishedintheDecisiononPrinciplesfortheDevelopmentofInternationalStandards,GuidesandRecom-mendationsissuedbytheWorldTradeOrganizationTechnicalBarrierstoTrade(TBT)Committee.2.ReferencedDocuments2.1ASTMStandards:2D1129TerminologyRelatingtoWaterD1193SpecificationforReagentWaterD1976TestMethodforElementsinWaterbyInductively-CoupledPlasmaAtomicEmissionSpectroscopyD279...
