Designation:E2244−11´1StandardTestMethodforIn-PlaneLengthMeasurementsofThin,ReflectingFilmsUsinganOpticalInterferometer1ThisstandardisissuedunderthefixeddesignationE2244;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.ε1NOTE—Reference(1)waseditoriallyrevisedinSeptember2013.1.Scope1.1Thistestmethodcoversaprocedureformeasuringin-planelengths(includingdeflections)ofpatternedthinfilms.Itappliesonlytofilms,suchasfoundinmicroelectromechani-calsystems(MEMS)materials,whichcanbeimagedusinganopticalinterferometer,alsocalledaninterferometricmicro-scope.1.2Thereareotherwaystodeterminein-planelengths.Usingthedesigndimensionstypicallyprovidesmoreprecisein-planelengthvaluesthanusingmeasurementstakenwithanopticalinterferometricmicroscope.(Interferometricmeasure-mentsaretypicallymoreprecisethanmeasurementstakenwithanopticalmicroscope.)Thistestmethodisintendedforusewheninterferometricmeasurementsarepreferredoverusingthedesigndimensions(forexample,whenmeasuringin-planedeflectionsandwhenmeasuringlengthsinanunprovenfabri-cationprocess).1.3Thistestmethodusesanon-contactopticalinterfero-metricmicroscopewiththecapabilityofobtainingtopographi-cal3-Ddatasets.Itisperformedinthelaboratory.1.4Themaximumin-planelengthmeasuredisdeterminedbythemaximumfieldofviewoftheinterferometricmicro-scopeatthelowestmagnification.Theminimumdeflectionmeasuredisdeterminedbytheinterferometricmicroscope’spixel-to-pixelspacingatthehighestmagnification.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappro-priatesafetyandhealthpracticesanddeterminetheapplica-bilityofregulatorylimitationspriortouse.2.ReferencedDocuments2.1ASTMStandards:2E2245TestMethodforResidualStrainMeasurementsofThin,ReflectingFilmsUsinganOpti...
